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为优化电弧离子镀AlCrSiN涂层的制备工艺，获得最佳的脉冲偏压占空比，采用全自动脉冲电弧离子镀技术，在不同脉冲偏压占空比下分别制备AlCrSiN涂层，利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、划痕仪、球-盘式摩擦磨损试验机等对涂层物相组成、表面形貌、力学性能及摩擦学行为进行表征。结果表明：当脉冲偏压占空比从60%上升到80%时，制备的AlCrSiN涂层表面微坑缺陷和大颗粒数量逐渐减少，涂层结构变得更加致密；当脉冲偏压占空比增大到90%时，涂层表面粗糙度增加。当脉冲偏压占空比为70%时，AlCrSiN涂层硬度最高，约为11.35 GPa；当脉冲偏压占空比为80%时，涂层临界载荷Lc3达最大值98.5 N。当脉冲偏压占空比为80%时，涂层摩擦系数最低，约为0.50。涂层磨损率随脉冲偏压占空比增加，先上升后下降，当脉冲偏压占空比为60%时，制备的AlCrSiN涂层磨损率最低，约3.21×10-3μm3/(N·μm)。经比较，当脉冲偏压占空比为70%时，制备的涂层具有最佳的综合性能。
Abstract：To optimize the preparation process of arc ion plating AlCrSiN coatings and obtain the best pulsed bias duty cycles,the automatic pulsed arc ion plating technology was employed to prepare AlCrSiN coatings at different pulsed bias duty cycles. The phase constituent,surface morphology,mechanical properties,and tribological behaviors of the different coatings were characterized by X-ray diffractometer(XRD),scanning electron microscope(SEM),scratch tester,and ball-on-disc tribometer,etc. The results show that as the pulsed bias duty cycle increased from 60% to80%,the amount of micro-pit defects and large particles on the surface of the prepared AlCrSiN coatings decreased gradually,and the coating structure became denser; as the pulsed bias duty cycle increased to 90%,the surface roughness of the coatings increased significantly; the hardness of AlCrSiN coating was highest at a pulsed bias duty cycle of70%,approximately 11.35 GPa; the critical load Lc3 of coatings reached the maximum value of 98.5 N at a pulsed bias duty cycle of 80%; the coating friction coefficient was lowest at a pulsed bias duty cycle of 80%,around 0.50;with the increase of pulsed bias duty cycle,the wear rate first increased and then decreased; the wear rate of resulted AlCrSiN coating was the lowest,about 3.21×10-3μm3/(N·μm) at a pulsed bias duty cycle of 60%. Comparatively,the coating prepared at a pulsed bias duty cycle of 70% exhibited the best overall performance.
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基本信息:
DOI：10.19573/j.issn2095-0926.202401001
中图分类号:TG174.4
引用信息:
[1]白乌力吉,刘艳梅,张蕊等.脉冲偏压占空比对电弧离子镀AlCrSiN涂层结构和性能的影响[J].天津职业技术师范大学学报,2024,34(01):1-7.DOI:10.19573/j.issn2095-0926.202401001.
基金信息:
天津市多元投入基金重点项目（22JCZDJC00670）; 天津市教委科研计划重点项目（2022ZD020）