nav emailalert searchbtn searchbox tablepage yinyongbenwen piczone journalimg searchdiv qikanlogo popupnotification paper
2024 01 v.34 1-7
脉冲偏压占空比对电弧离子镀AlCrSiN涂层结构和性能的影响
基金项目(Foundation): 天津市多元投入基金重点项目(22JCZDJC00670); 天津市教委科研计划重点项目(2022ZD020)
邮箱(Email): ymliu@tute.edu.cn.;tgwang@tute.edu.cn.;
DOI: 10.19573/j.issn2095-0926.202401001
中文作者单位:

天津职业技术师范大学天津市高速切削与精密加工重点实验室;

摘要(Abstract):

为优化电弧离子镀AlCrSiN涂层的制备工艺,获得最佳的脉冲偏压占空比,采用全自动脉冲电弧离子镀技术,在不同脉冲偏压占空比下分别制备AlCrSiN涂层,利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、划痕仪、球-盘式摩擦磨损试验机等对涂层物相组成、表面形貌、力学性能及摩擦学行为进行表征。结果表明:当脉冲偏压占空比从60%上升到80%时,制备的AlCrSiN涂层表面微坑缺陷和大颗粒数量逐渐减少,涂层结构变得更加致密;当脉冲偏压占空比增大到90%时,涂层表面粗糙度增加。当脉冲偏压占空比为70%时,AlCrSiN涂层硬度最高,约为11.35 GPa;当脉冲偏压占空比为80%时,涂层临界载荷Lc3达最大值98.5 N。当脉冲偏压占空比为80%时,涂层摩擦系数最低,约为0.50。涂层磨损率随脉冲偏压占空比增加,先上升后下降,当脉冲偏压占空比为60%时,制备的AlCrSiN涂层磨损率最低,约3.21×10-3μm3/(N·μm)。经比较,当脉冲偏压占空比为70%时,制备的涂层具有最佳的综合性能。

关键词(KeyWords): 全自动电弧离子镀;AlCrSiN涂层;脉冲偏压占空比;微观结构;力学性能;摩擦性能
参考文献

[1]国政,陈强,王正铎,等.化学气相沉积/原子层沉积铜前驱体的研究进展[J].真空科学与技术学报,2015,35(10):1282-1290.

[2]王力,李靖晗,李华民,等. CVD制备碳化硅膜层的工艺温度影响与性能[J].中国高新科技,2023(10):99-101.

[3]张儒静,黄光宏,甄真,等.铜基底上大尺寸石墨烯单晶的化学气相沉积法制备研究进展[J].材料工程,2023,51(5):46-57.

[4]?AM A S,ERGüDER T O,KAYA G,et al. Improvement of structural/tribological properties and milling performances of tungsten carbide cutting tools by bilayer Ti Al N/TiSiN and monolayer Al Cr SiN ceramic films[J]. Ceramics International,2022,48(18):26342-26350.

[5] WEI Q P,YU Z M,ASHFOLD M N R,et al. Effects of thickness and cycle parameters on fretting wear behavior of CVD diamond coatings on steel substrates[J]. Surface and Coatings Technology,2010,205(1):158-167.

[6]张权,许雨翔,王启民,等.先进复合物理气相沉积技术制备高性能硬质涂层[J].工具技术,2020,54(7):3-7.

[7] J?GER N,MEINDLHUMER M,ZITEK M,et al. Impact of Si on the high-temperature oxidation of Al Cr(Si)N coatings[J].Journal of Materials Science&Technology,2022,100:91-100.

[8] STRNAD G,BUHAGIAR J. Latest developments in PVD coatings for tooling[J]. Acta Marisiensis. Seria Technologica,2010,7(1):32-37.

[9]朱学明,关伟锋,叶康琳,等. PVD涂层铣刀的制备及其磨损研究[J].工具技术,2022,56(9):38-42.

[10]刘晓红,陈志勇,邓山江.气相沉积技术的现状与发展[J].华北航天工业学院学报,2006,16(3):26-28.

[11]王振宇,刘燕才,陈琨,等.等离子喷涂-化学气相沉积制备α/β-Bi2O3薄膜的相结构调控和光催化降解性能[J].硅酸盐学报,2023,51(7):1800-1810.

[12]刘杰,朱水生,肖晓兰,等. AlCrSiN涂层刀具干车削Ti-6Al-4V钛合金的切削性能研究[J].广东工业大学学报,2021,38(2):99-106.

[13]高营.高强韧AlCrSiN刀具涂层的梯度多层结构设计与性能研究[D].马鞍山:安徽工业大学,2020.

[14]刘艳梅,张蕊,朱强,等.沉积温度对电弧离子镀AlCrSiN涂层的影响[J].表面技术,2023,52(7):149-157.

[15]吴世雄,张文锋,刘广东,等.低温液氮冷却下高速切削淬硬钢的切屑形成及刀具磨损[J].中国机械工程,2022,33(5):551-559.

[16]林成虎,任靖日,周俊宏.涂层刀具在机械加工中的应用实例[J].延边大学学报(自然科学版),2012,38(1):92-94.

[17]LIANG J,ALMANDOZ E,ORTIZ-MEMBRADO L,et al. Mechanical performance of AlCrSiN and AlTiSiN coatings on inconel and steel substrates after thermal treatments[J]. Materials,2022,15(23):8605.

[18] ZHANG S H,WANG L,WANG Q M,et al. A superhard CrAlSiN superlattice coating deposited by multi-arc ion plating:I. Microstructure and mechanical properties[J]. Surface and Coatings Technology,2013,214:160-167.

[19]钟星,王启民,许雨翔,等.占空比对脉冲电弧离子镀AlCrSiN涂层热稳定性和抗氧化性的影响[J].中国表面工程,2018,31(5):99-107.

[20] LI W,LIU P,ZHU X D,et al. Effect of Si content on microstructural evolution and superhardness effect of TiN/CrAlSiN nanomultilayered films[J]. Journ al of Alloys and Com-pounds,2015,650:592-597.

[21] GAO Y,CAI F,LU X,et al. Design of cycle structure on microstructure,mechanical properties and tribology behavior of AlCrN/AlCrSiN coatings[J]. Ceramics International,2022,48(9):12255-12270.

[22] KARIMI A,MORSTEIN M,CSELLE T. Influence of oxygen content on structure and properties of multi-element AlCrSiON oxynitride thin films[J]. Surface and Coatings Technology,2010,204(16/17):2716-2722.

[23]乔宏,李灿伦,蔺增,等.电弧离子镀弧斑运动对膜层质量影响分析[J].真空,2022,59(5):32-37.

[24]黄美东,林国强,董闯,等.偏压对电弧离子镀薄膜表面形貌的影响机理[J].金属学报,2003,39(5):510-515.

[25]魏永强,刘建伟,文振华,等.脉冲偏压占空比和放置状态对大颗粒分布规律的影响[J].热加工工艺,2015,44(4):134-137.

[26] WU W W,CHEN W L,YANG S B,et al. Design of AlCrSiN multilayers and nanocomposite coating for HSS cutting tools[J]. Applied Surface Science,2015,351:803-810.

[27] TRITREMMEL C,DANIEL R,LECHTHALER M,et al. Influence of Al and Si content on structure and mechanical properties of arc evaporated Al-Cr-Si-N thin films[J]. Thin Solid Films,2013,534:403-409.

[28] LI J L,TAN C B,LUO X Y,et al. Preparation and toughness optimization of(AlCrSiN/TiN)20/Ti multilayer multiscale bionic tool coatings[J]. Applied Surface Science,2023,634:157-585.

[29] CAI F,CHEN M H,LI M X,et al. Influence of negative bias voltage on microstructure and property of Al-Ti-N films deposited by multi-arc ion plating[J]. Ceramics International,2017,43(4):3774-3783.

[30]WANG T G,ZHAO S S,HUA W G,et al. Design of a separation device used in detonation Gun spraying system and its effects on the performance of WC-Co coatings[J]. Surface and Coatings Technology,2009,203(12):1637-1644.

基本信息:

DOI:10.19573/j.issn2095-0926.202401001

中图分类号:TG174.4

引用信息:

[1]白乌力吉,刘艳梅,张蕊等.脉冲偏压占空比对电弧离子镀AlCrSiN涂层结构和性能的影响[J].天津职业技术师范大学学报,2024,34(01):1-7.DOI:10.19573/j.issn2095-0926.202401001.

基金信息:

天津市多元投入基金重点项目(22JCZDJC00670); 天津市教委科研计划重点项目(2022ZD020)

检 索 高级检索

引用

GB/T 7714-2015 格式引文
MLA格式引文
APA格式引文