天津职业技术师范大学学报

为解决以压电陶瓷为驱动源的快速反射镜在偏转角度上由于压电陶瓷伸长量较小而受限的问题，设计了一款位移放大机构驱动的压电快反镜。文章分析了驱动源数量及其布置方式，设计L形杠杆式位移放大机构对压电陶瓷的输出位移进行放大，选择微型光栅系统作为位移传感器，再通过搭配万向柔性铰链实现快反镜的偏转运动，并采用有限元方法进行仿真验证。结果表明：设计的快反镜偏转范围达到了0.5°，一阶谐振频率可达227.68Hz，能够满足大行程、高带宽的工作需求。

To address the limited deflection angle of fast steering mirrors(FSMs) driven by piezoelectric ceramics due to their small elongation, a piezoelectric FSM with a displacement amplification mechanism was designed. This paper analyzes the number and arrangement of the driving sources. An L-shaped lever displacement amplification mechanism was devised to magnify the output displacement of the piezoelectric ceramics, a miniature grating system was selected as the displacement sensor, and a universal flexible hinge was incorporated to achieve the deflection motion of the FSM. Finite element simulation was conducted for verification. The results indicate that the designed FSM achieves a deflection range of 0.5° and a first-order resonance frequency of 227.68 Hz, meeting the requirements for large stroke and high bandwidth.