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采用复合脉冲磁控溅射技术沉积AlCrSiN/Mo涂层,并利用真空热处理方式改善涂层微观结构和性能。利用SEM、XRD、EDS、纳米压痕仪、划痕仪、应力测试仪、摩擦磨损试验机分别对沉积态、600℃、700℃、800℃、900℃真空热处理后的AlCrSiN/Mo涂层元素成分、微观结构、力学性能及摩擦磨损性能进行测试。实验结果表明:经真空热处理后,AlCrSiN/Mo涂层仍保持nc-(Al,Cr,Mo)N/a-Si3N4的纳米复合结构,并沿(200)晶面择优生长,涂层中hcp-AlN相消失;涂层表面颗粒生长更加充分,组织结构更加致密,孔隙率减少;硬度、韧性及残余应力均有所增加,临界载荷下降,耐磨性能得到一定改善。当热处理温度达到900℃时,涂层表现出最好的综合性能,硬度H高达17.60 GPa,表面质量最佳,摩擦系数和磨损率最低,分别为0.61和1.69×10-3μm3/(N·μm),此时H/E和H3/E*2最高。
Abstract：The AlCrSiN/Mo coatings were prepared by hybrid pulse magnetron sputtering,and the structure and properties were modified by vacuum annealing treatment.The chemical compositions,microstructure,mechanical properties,and tribological performances of the AlCrSiN/Mo coatings as-deposited and after vacuum annealing respectively at600 ℃,700 ℃,800 ℃ and 900 ℃ were investigated by SEM,XRD,EDS,nano-indenter,scratch tester,film stress tester,and tribometer.The experimental results showed that after vacuum annealing,the AlCrSiN/Mo coatings still possessed the nanocomposite structure of nc-(Al,Cr,Mo)N/a-Si3N4 and grew preferentially along the(200) crystal plane,whereas the hcp-AlN phase disappeared.With the sufficient growth of surface particles,the coating surface became more compact and less porous.The nano-hardness,toughness,and residual stress increased,and the critical load decreased.As a result,the tribological performance was improved.When the annealing temperature was 900 ℃,the resulted coating presented the best properties.The coating nano-hardness reached the maximum 17.60 GPa,and possessed the best surface quality.The coating friction coefficient and wear rate reached the lowest values 0.61 and 1.69 ×10-3μm3/(N·μm ),respectively and the characteristic values of H/E and H3/E*2 were also the highest.
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基本信息:
DOI：10.19573/j.issn2095-0926.202104002
中图分类号:TG174.4;TG71
引用信息:
[1]李壮,刘艳梅,朱建博等.真空热处理强化AlCrSiN/Mo涂层研究[J].天津职业技术师范大学学报,2021,31(04):6-13.DOI:10.19573/j.issn2095-0926.202104002.
基金信息:
国家自然科学基金资助项目(51301181); 天津市科技重大专项(18ZXJMTG00050); 天津市自然科学基金资助项目(19JCYBJC17100); 天津市科技特派员项目(20YDTPJC01460); 天津市教委项目(2020KJ103); 天津职业技术师范大学科研发展基金资助项目(KJ2001)